ASPECTS OF HIGH INTEGRATION IN MEMS TECHNOLOGY
MEMS (Micro-Electro-Mechanical-Systems) technology challenges interdisciplinary teams of designers with the integration of diverse micro technologies in complex and highly integrated systems under continuously developing boundary conditions. MEMS development therefore requires an effective design process, guidelines for geometry, manufacturing and materials as well as assistance in the understanding of the entire system. A new developed working structure for MEMS supplies a holistic system view beyond the functional aspects covered by the function structure. It is enriched by a Design Structure Matrix enabling the designer to consider and optimise physical, geometrical and functional influences and dependencies during the design process.